Advanced Benchtop Stylus Profilometer Introduced
Bruker Corporation has announced the release of the Dektak Pro stylus profilometer, the next-generation profiler in the industry-leading Dektak product line. Incorporating over 55 years of innovation, the new benchtop system provides an expanded measurement area up to 200 mm of full-sample access for semiconductor applications, as well as a shortened time to results with improved user experience and measurement accuracy. Dektak Proincorporates advancements that solidify the brand as the world’s most advanced stylus profiler, positioning it to address R&D, process development, and QA/QC present and future needs across a host of industrial and research markets.
Dektak Pro delivers accurate, precise data with the highest resolution, lowest noise floor, and easiest tip exchange of any commercially available stylus profilometer. State-of-the art measurement and analysis technology maximizes repeatability and accuracy, making single-nanometer step height measurements and better than 4 Å repeatability possible.
Every step of the measurement and analysis process is accelerated with Dektak Pro. Direct-drive scan stage technology reduces time between scans, and 64-bit parallel processing in the Vision64 software enables fast data processing. Additional speed and ease-of-use technological advancements in Dektak Pro include a new algorithm that brings nearly the entire field of view into focus in the optical live image, making it easier to locate features of interest. A new step height algorithms automate analysis routines, improve consistency, and minimize potential user error in step height calculations.
“We have a long history with Dektak tools, and they have been providing the automated and reliable step profiling for our MEMS fab that we rely on,” said Dr. Nithi Atthi, Fab Manager at Thai Microelectronics Center (TMEC). “The new system’s technological advancements promise even more measurement capabilities to meet our increasingly stringent high aspect ratio microstructures for MEMS metrology requirements.”
“The name Dektak has become synonymous with stylus profiling, and for good reason. Hundreds of Dektak systems are installed around the world every year, proving an enduring need for this technology,” added Samuel Lesko, Senior Director and General Manager of Bruker’s Tribology, Stylus and Optical Metrology Business. “With Dektak Pro, we have taken the next step in measurement capability and ease of operation while maintaining the value and reliability that Dektak is so well known for, and I really look forward to seeing the many ways our customers will use the system in the years to come.”
For more information: www.bruker.com
