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Compact DMA Focus Stage Targets Optical Metrology and Semiconductor Inspection

Zaber Technologies has announced the DMA Objective Focus Stage, a compact, linear motor solution for microscope system builders and OEM manufacturers. The DMA delivers 50 nm repeatability and 10 nm minimum incremental moves, providing comparable precision to piezo stages at one-third the cost. This high-duty-cycle workhorse maximizes imaging throughput with sub-15 ms move and settle times and features an integrated controller within a slim 77 mm x 100 mm x 30.5 mm footprint.

The DMA moves OEM systems from prototype to production faster by eliminating the ‘integration tax’ common with complex focus stages.

Plug and Play Architecture: Start moving in minutes with integrated controllers and a simple two-cable setup

No-Code Optimization: Use the Zaber Launcher application Oscilloscope and Servo Tuning tools to maximize throughput and verify performance, without writing a single line of code.

Easy Synchronization: Connect with third-party hardware and sensors via integrated I/O and encoder outputs.

Developer-Friendly API: Integrate quickly using a modern, open-source API with sample code for each feature in Python, C#, C++, and more.

Simplified Topology: Daisy-chain with XY stages and other modules using a single data/power cable to eliminate the ‘cable nest’.

“The DMA offers the best of both worlds: the nanometer precision and rapid settling of a piezo stage, combined with the load capacity and long travel of a direct-drive system,” says Mike Fussell, Product Manager at Zaber Technologies.”By integrating the controller and
counterbalance, we’ve minimized the footprint and cost, making it easier for OEMs to scale from prototype to production.”

The DMA is ideal for demanding, high-accuracy optical metrology & semiconductor inspection where precision positioning with 1 nm resolution optical encoders is required.

For more information: www.zaber.com

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