GBS Metrology Introduces Configurable Optical 3D Profilometer Systems
GBS metrology, a supplier of optical 3D sensors based on white light interferometry (WLI), also known as coherence scanning interferometry (CSI), is expanding its portfolio of complete optical 3D profilometers.
The portal can be configured to suit different samples and measurement areas. Optional XY stages offer travel ranges from 100 × 100 mm² to 400 × 400 mm². Motorized Z axes are available with 50-, 100- or 200-mm travel, with motorized tip/tilt for automated sample alignment.
Flexible Sensor and Objective Configurations
Complete profilometers can be configured with sensors from the smartWLI nimbus, next, firebolt, compact and nanoscan product families. Depending on the application, the optical setup can include an objective turret for automated magnification changes or a single objective for a dedicated measurement task.
The portfolio supports different measurement priorities: selected smartWLI nimbus configurations capture up to 8 million measurement points in a single scan, while firebolt configurations support camera frame rates of up to 2.5 kfps at full resolution. Users can configure a system for high spatial resolution, maximum measurement speed or a balance of both.
SmartRevelonix Controls Automated Workflows
The new smartRevelonix control software is designed to replace smartVIS3D and its optional modules. It controls the motorized components of automated measuring stations and supports measurement setup, execution, evaluation and data export.
The automation editor supports complex tasks, multiple measurement positions, objective changes and automated result exports. The software can use reference marks on the sample to compensate positioning errors. Autofocus works within the motorized Z-axis range. Automatic levelling is available with motorized tip/tilt; other systems can pause for manual levelling. A program database supports selection of stored workflows.
The graphical interface provides camera-image display, intensity and contrast adjustment, and controls for scan range, increments, evaluation macros, regions of interest and data decimation. Motorized stages, measurement macros and stitching support automated scans across multiple positions and larger areas.
Real-Time GPU Processing for High-Quality 3D Data
Measurement data are processed in real time on programmable GPUs (GPGPUs), using VSI, EPSI or GBS metrology’s advanced HD-EPSI+. In a demonstrated smartWLI configuration, HD-EPSI+ processes up to 1,920 interferometric images per scan; averaging and outlier suppression reduce system noise by approximately a factor of six, supporting sub-Ångström roughness measurement on super-polished surfaces.
ICCE (Image Correction and Contrast Enhancement) improves measurement signals on weakly reflecting surfaces and steep slopes. AQC (Advanced Quality Control) assesses the correlogram at each measurement point to identify ambiguous signals and help prevent outliers.
Height separation helps distinguish closely spaced surface features at different height levels, supporting high lateral resolution on challenging structures.
Real-Time GPU Processing for High-Quality 3D Data
Measurement data are processed in real time on programmable GPUs (GPGPUs). GBS metrology combines High-Density Extended Phase-Shift Interferometry (HD-EPSI+) with Image Correction and Contrast Enhancement (ICCE) and Advanced Quality Control (AQC) to deliver low-noise, high-quality 3D surface data.
HD-EPSI+ reduces system noise and supports sub-Ångström roughness measurement on super-polished surfaces. ICCE enhances signals from weakly reflecting materials and steep slopes, while AQC evaluates the correlogram at every measurement point to identify ambiguous signals and suppress outliers. Height separation helps distinguish closely spaced features at different height levels, supporting high lateral resolution on challenging structures.
For more information: www.gbs-metrology.com
