Nanotronics, the factory control company, recently announced its latest photoluminescence system, nSpec PRISM. The latest addition to the Nanotronics product suite offers a complete solution for SiC frontend wafer manufacturing from unpolished SiC substrate to epitaxy and device manufacturing, eliminating the need for destructive testing methods such as KOH etching. The system specializes in pairing transmission and PL microscopy for high volume inspection of SiC killer defects such as micropipes and dislocations.
Nanotronics, a vertically integrated manufacturer of automated optical inspection systems, is expanding its system portfolio through the introduction of the nSpec PRISM. The platform introduces a new illuminator which allows Nanotronics to deliver more power to the sample plane. The illuminator enables operators to utilize existing imaging modalities like brightfield, transmission, darkfield, and Nomarski DIC while adding UV and IR illumination to inspection processes.
“We are excited to introduce nSpec PRISM to our existing and expanding customer base worldwide. The custom illuminator is a crucial component of our modular design, allowing our customers to broaden their defect detection and classification capabilities directly on the factory floor,” says Director of Product, APAC, Jacob Keith. “Designing and manufacturing our illuminator this way also helps us reduce global supply chain pressures and maintain our efficient lead and support times.”
The nSpec PRISM system, when coupled with Nanotronics’ existing AI infrastructure, nTelligence, allows customers to detect and classify stacking faults, triangles, and other defects of interest on SiC epitaxial wafers as well as cracks and sliplines in GaN.
Nanotronics is combining AI, robotics, super resolution, and 3D imaging for tomorrow’s manufacturing and quality control processes creating automated optical inspection systems for the world’s most advanced technologies: semiconductors, microchips, hard drives, LEDs, aerospace hardware, nano-fillers, nanotubes, and nano-medicine.
For more information: www.nanotronics.co