Metrology System Provides 100% Overlay Measurement on Every Wafer Die
EV Group (EVG), a provider of innovative process solutions and expertise serving leading-edge and future semiconductor designs and chip integration schemes, recently unveiled the EVG40 D2W – the first dedicated die-to-wafer overlay metrology platform to deliver 100 percent die overlay measurement on 300-mm wafers at high precision and speeds needed for production environments.
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