World’s First Hybrid 3D Optical Profilometer Unveiled
Evident has announced the launch of its LEXT OLS5500 hybrid 3D optical profilometer, an award-winning platform that sets a new standard in precision surface measurements. Uniting laser scanning microscopy (LSM), white light interferometry (WLI), and focus variation microscopy (FVM), the OLS5500 helps labs move seamlessly from first discovery to final decision with precise surface detail, traceable accuracy, and smart automated workflows.
Designed for R&D, quality assurance, and quality control, the OLS5500 is world’s first 3D optical profilometer to offer guaranteed accuracy and repeatability1 for both LSM and WLI measurements, ensuring consistent, high-precision measurements across surfaces. Guaranteed measurement noise levels2 in accordance with ISO standards also ensure high-resolution capture of subtle topographic changes. For larger regions, the OLS5500 guarantees3 the accuracy of stitched image data for both LSM and WLI.
Built on more than a century of optical innovation, the OLS5500 offers exceptional precision imaging with in-house engineered optics. LEXT objective lenses maintain clarity and shape fidelity throughout the field of view to support accurate measurements, while high NA WLI optics expand the field of view for up to 40 times faster measurement throughput compared to conventional LSM. The system’s smart automation, intuitive interface, and PRECiV software integration help users of all levels move efficiently from observation to inspection and measurement.
“Our goal was to build a 3D optical profilometer that bridges the gap between exploratory research and high‑throughput surface metrology,” said Cindy Zhang, VP of Product Management, Materials Science at Evident. “By integrating laser scanning, white light interferometry, and focus variation technologies, the award-winning LEXT OLS5500 enables labs to move seamlessly from fine structural insights to production‑ready measurement.”
During its pre-release, the OLS5500 3D optical profilometer received the Good Design Award 2025 from the Japan Institute of Design Promotion, recognizing its precision in measuring a wide range of surface types.
Judges’ Comments: “This product was highly praised for offering a beautifully refined solution as a measurement instrument designed to evaluate ‘microfabrication,’ a growing need in the semiconductor and electronic components markets. In particular, it enables precise measurements from the nanometer to micrometer scale with a single device—an essential capability as nanometer-level evaluation becomes increasingly critical. The product is expected to contribute significantly to the development of new technologies, quality improvement, and the realization of a sustainable society in these industries. Its design thoughtfully balances intuitive operability and efficiency, considering the diverse environments and user profiles in which it will be used. The product embodies over a century of field-proven expertise and technological excellence, carefully and sincerely integrated into its design.”
1 Based on Evident’s internal research as of October 2025. The guaranteed accuracy and repeatability apply only if the device has been calibrated according to the manufacturer’s specifications and is in defect free condition. Calibration must be performed by an Evident technician or an Evident-authorized specialist.
2 Users will receive a Measurement Noise Guarantee Certificate. This is a representative value measured under conditions specified by Evident and may differ from the guaranteed value.
3 The guaranteed accuracy for stitched images applies only to the 100 mm motorized stage.
For more information: www.evidentscientific.com
