Metron3D Delivers Sub-Nanometre 3D Metrology In-Line
Infinitesima has announced that SK hynix, a full stack artificial intelligence memory provider, has adopted the Metron3D 300mm in-line wafer metrology system and released it for use in volume production. The Metron3D provides three-dimensional process control with sub-nanometre accuracy, crucial for fabrication of SK hynix’s next-generation memory devices.
The release to production follows an extensive evaluation period, applying the system for characterization across multiple process steps.
Semiconductor manufacturers increasingly require higher-resolution 3D metrology solutions to control next-generation processes that cannot be addressed by current optical and electron beam techniques. Infinitesima has introduced the Metron3D high-speed metrology system, featuring the company’s patented RPM technology, to address the growing customer need for in-line sub-nanometre 3D process control.
Mr. Young-Hyun Choi, Head of DMI (Defect Analysis, Metrology and Inspection Technology) stated, “Three-dimensional process control at the nano-scale level is becoming increasingly important to ensure high yield in advanced DRAM processes. Infinitesima’s Metron3D has demonstrated excellent sub-nanometre 3D metrology with the required cost-of-ownership necessary for HVM implementation.”
The Metron3D features Infinitesima’s proprietary Rapid Probe Microscope (RPM) technology that provides AFM measurement capability at 10× to 100× typical AFM throughput. The system’s capabilities also include fully automated wafer, data, and probe handling, making it optimal for in-line volume production of semiconductor devices. The investment in this metrology solution highlights SK hynix’s commitment to maintaining technical leadership in the development and manufacture of computer memory.
“We are delighted to be working with SK hynix; their support and guidance has enabled rapid qualification of our Metron3D system and deployment in HVM,” stated Peter Jenkins, Infinitesima President & CEO.
Infinitesima Limited is a UK-based leader in advanced metrology solutions for the semiconductor industry. The company has pioneered an innovative technology combining atomic force microscopy’s 3-dimensional surface detection capability, high-speed laser activation, and the accuracy of interferometry.
For more information: www.infinitesima.com
