Machine Learning and Optical Modelling Revolutionizes Measurement Data Utilization

Nova, a leading innovator and a key provider of metrology solutions for advanced process control used in semiconductor manufacturing has launched its NOVAFit engine, which enhances traditional modelling capabilities with advanced machine learning algorithms. The new software improves metrology capabilities and accelerates time to solution in complex 3D and High Aspect Ratio devices. Together with Nova’s Fleet Management big data solution, NOVAFit utilizes fleetwide information to provide adaptive advanced metrology solutions based on continuous training.

The new suite of software capabilities will complement all of Nova’s fleet and will work in conjunction with Nova’s advanced modelling engine –NovaMARS. The new solution, which embeds the most advanced machine learning and big data architecture into optical modelling, revolutionizes the way customers utilize metrology measurement data and expands the metrology performance envelope to tighten process windows, avoid process excursions and improve yield. The platform was designed to interface with other process control tools for accuracy improvement and shorter training and control cycles. With this new significant supplement, NOVAFit, in conjunction with Nova’s
Fleet Management, is now connecting all of Nova’s metrology fleet to one big data cluster, which applies smart algorithms to improve the measurements’ accuracy and process feedback across multiple fabrication steps. This new approach enhances Nova’s capability in measuring multiple parameters in a much more robust method and improves its competitive position.

We are excited to announce NOVAFit™, our new modelling software engine, which significantly enhances the way customers utilize metrology process control schemes in the most advanced nodes,” commented Dr. Udi Cohen, Nova’s Dimensional Metrology Division Head. “This breakthrough solution is powered by innovative machine learning algorithms and big data analytics for more accurate and reliable results. Through the development of
this solution, we utilize our process insights knowledge, big data analytics and the most advanced industry grade machine learning capabilities. Combined with NovaMARS® modelling software, we can provide our customers with better, faster, more accurate and robust measurements for process monitoring and yield improvement, while reducing overall metrology complexity.”

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